Optical metrology

Camera-based surface inspection systems provide images of the surface, which usually have to be further evaluated for the derivation of quality statements (e.g. the 3D shape of objects and deviations from the desired shape). Examples are deflectometry, photometric stereo, time-of-flight cameras or plenum optical cameras. Easy-to-use methods and algorithms for surface reconstruction and for the universal evaluation of the received sensor data are needed, which achieve reliable and exact statements about the object to be measured and, if necessary, the sensor data of different measuring systems with methods of sensor data and information fusion (e.g. for detection and classification of defects) must be taken into account.